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Though our wordline half-pitch measurement indicates a process node of 46-nm, if we were to look at the half-pitch of the STI (a much tighter arrangement in this DRAM structure compared to previous generations), we could conceivably call this a 30-nm device. However, under traditional 6F2 architecture, if F was to equal 30-nm, the cell size should be 0.0054 um2 (the calculation comes from 2Fx 3F= (0.030um * 2) x (0.030 * 3)=0.0054um2 ), smaller than the cell size we have measured of 0.0085 um2 .

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